susceptor
n.
基座；感受器；
英英释义
Susceptor
A susceptor is a material used for its ability to absorb electromagnetic energy and convert it to heat (which is sometimes designed to be re-emitted as infrared thermal radiation). This energy is typically radiofrequency or microwave radiation used in industrial heating processes, and also occasionally in microwave cooking.
以上来源于:Wikipedia
权威例句
Patterned microwave susceptorRapid thermal annealing of GaAs in a graphite susceptor—comparison with proximity annealing
Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD
Chemical vapor deposition coating process employing radiant heat and a susceptor
Clamping ring and susceptor therefor
Proper Orthogonal Decomposition for Flow Calculations and Optimal Control in a Horizontal CVD Reactor
Rapid thermal processing apparatus for processing semiconductor wafers
Wafer support system
Design of gas inlets for the growth of gallium nitride by metalorganic vapor phase epitaxy
Flow and heat transfer in CVD reactors: Comparison of Raman temperature measurements and finite element model predictions
1. A flexible substrates is mounted on the cylindrical susceptor.
挠性衬底安装在圆柱形衬托器上。
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2. The susceptor rested on a pedestal whose shaft is connected to a motor that provides rotation.
器安装在轴承台上，它的支架与提供旋转的马达相接。
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3. In the other embodiment, the susceptor cross section is a polygon with a plurality of substrates mounted on its facets.
在另一个实施方式中，衬托器截面是多边形，且多个衬底安装在衬托器的面上。
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4. Using finite analytic solution we gave the numerical computation of the flow field in CVD reactor with tilted susceptor.
本文用有限分析方法，对带有倾斜基座的CVD反应器内流场进行了数值计算。
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5. In one embodiment, the process reactor has four composite injectors arranged substantially parallel to the axis of rotation of the cylindrical susceptor.
在一个实施方式中，处理反应器具有基本上平行于圆柱形衬托器的旋转轴设置的四个复合注入器。
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6. In one embodiment, the process reactor has four composite injectors arranged substantially parallel to the axis of rotation of the cylindrical susceptor.
在一个实施方式中，处理反应器具有基本上平行于圆柱形衬托器的旋转轴设置的四个复合注入器。
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susceptor
